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Fabrication
Lab
Wet bench, Fume Hood type
Mask aligner (Micro-Tech 2021)
Wire bonder (Kulicke&Soffa 484)
Mask duplicator
Liquid-nitrogen-cooled glove box
Dual gas cabinet (Spectra Gases Inc.)
Olympus BHMJL inspection microscope (eyepieces 10x ; objectives:
NeoPlan 10x , 20x, 40x, 100x)
Spin-coater (Headway Research Inc. Photoresisit Spinner)
Fibre optic cleaver (Fitel S323)
Fusion splicer (Fitel S182A)
Benchtop environmental chamber (Delta Design 6400, -70 to
+270oC)
Digital hot plates (Barnstead 720P and Thermolyne Nuova II)
Heating plate and controller (Sigma System TP-294)
Ultrasonic cleaner (Branson 8510)
Microprocessor controlled water bath (Precision 281)
Balance (Denver Instruments, TR-203)
Oven (Cole-Parmer gravity convection lab oven, 0.7 cf, 200C)
Vacuum pumps (Edwards, Fisher, Alcatel, Leybold, Welch Thomas,
Busch)
Fiber optic illuminators (Stocker & Yale) |